Electrical, optical and structural investigation of plasma-enhanced chemical-vapor-deposited amorphous silicon oxynitride films for solar cell applications
Solar energy materials & solar cells ; 108 ; 180-188
2013
Aufsatz (Zeitschrift)
Englisch
Characterization of hydrogenated amorphous silicon-carbon films deposited by hybrid-plasma CVD
Online Contents | 1994
|Chemical Vapor Deposited Silicon Carbide Turbine Rotors
SAE Technical Papers | 1974
|