We developed amorphous alloy thin films having TCR(temperature coefficient of resistivity) less than ±5 ppm/°C for strain gauge applications. Thin film strain gauges are directly formed on metal substrates insulated with SiO2. These gauges have excellent aging stability at high temperature. The resistivity shows a drift in ▵R/R less than ±0.03% at 120°C in 1000 hours. We developed a pressure sensor and an acceleration sensor with high accuracy and reliability, employing these gauges.


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    Titel :

    Thin Film Strain Gauge Sensors for Automotive Applications


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:
    Sumi, Chiaki (Autor:in) / Kato, Yukihiro (Autor:in)

    Kongress:

    International Congress & Exposition ; 1993



    Erscheinungsdatum :

    01.03.1993




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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