This paper describes an absolute semiconductor pressure sensor suitable for the engine control systems in automobiles. Using the passive (electrically nonconnected) side of a sensor chip as the pressure interface, it has good pressure media compatibility. But it requires a pedestal with a pressure inlet hole and a larger contact area for good sealed, vacuum reference, since the larger contact area causes a larger temperature shift of the offset voltage due to thermal stress. We have analyzed the thermal stress by the finite element method and have designed a lower, tubular pedestal with a groove which has isolated the sensor chip from the thermal stress more effectively.As a result, the sensor chip has been assembled in a standard TO-5 package and a temperature shift of the offset voltage within ±1% error of FS (Full Scale) without temperature compensation in the temperature range of -30°C to 100°C has been realized.


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    Titel :

    High Reliability Absolute Semiconductor Pressure Sensor


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:
    Horiike, H. (Autor:in) / Yamagami, K. (Autor:in) / Bessho, M. (Autor:in) / Jinmon, M. (Autor:in) / Wataya, S. (Autor:in) / Tsuru, Y. (Autor:in)

    Kongress:

    SAE International Congress and Exposition ; 1983



    Erscheinungsdatum :

    01.02.1983




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch


    Schlagwörter :


    High reliability absolute semiconductor pressure sensor

    Bessho,M. / Tsuru,Y. / Horiike,H. et al. | Kraftfahrwesen | 1983


    High reliability absolute semiconductor pressure sensors

    Bessho, M. / Tsuru, Y. / Horiike, H. | Tema Archiv | 1983


    High Reliability Semiconductor Pressure Sensor for Automobiles

    Minorikawa, Hitoshi / Nishihara, Motohisa / Inui, Tomoji | SAE Technical Papers | 1982


    High reliability semiconductor pressure sensor for automobiles

    Inui,T. / Minorikawa,H. / Nishihara,M. et al. | Kraftfahrwesen | 1982


    WEATHERIZED DIRECT-MOUNT ABSOLUTE PRESSURE SENSOR

    KWA TOM / DANIELSON DON L | Europäisches Patentamt | 2017

    Freier Zugriff