As part of a program to develop a cooling system for satellite instrumentation capable of working at cryogenic temperature, the authors present herein pumping capacity and material reliability study on a silicon-based cryogenic micro pump which will be applied into a future cooling system to satisfy both active and remote cooling requirements. A test rig for actuating silicon diaphragm, the main functional component of the micro pump, was built by using compressive gas actuation. A Dewar was utilized to cool the diaphragm down to cryogenic temperature. The deflection of silicon diaphragms was measured using both WYKO and ZYGO interferometer. As a result, pumping capacity was derived. The maximum deflection of the silicon diaphragm was found to vary linearly with differential pressure, and the pumping capacity decreased at the cryogenic temperature. Additionally, micro-Raman spectroscopy was employed for stress mapping. As expected, the diaphragm edge centers are most vulnerable to fracture. Finally, a cryogenic fatigue test was conducted. The diaphragm suffered no damage during 106 cycles for about 10 days, thereby demonstrating the viability of the silicon-based system for space applications.


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    Titel :

    Pumping capacity and reliability study on silicon-based cryogenic micro pump


    Weitere Titelangaben:

    Untersuchung der Pumpleistung und Zuverlässigkeit kryogener Mikropumpen auf Siliciumbasis


    Beteiligte:
    Zhao, Yi (Autor:in) / Li, Biao (Autor:in) / Ludlow, Daryl (Autor:in) / Zhang, Xin (Autor:in)


    Erscheinungsdatum :

    2004


    Format / Umfang :

    4 Seiten, 7 Bilder, 12 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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