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    Title :

    Fabrication and Characterization of PECVD Oxynitride Rectangular and Rib Optical Waveguides


    Contributors:

    Conference:

    6th, Chinese opto-electronics symposium ; 2003 ; Hong Kong, China



    Publication date :

    2003-01-01


    Size :

    4 pages


    Remarks:

    Also known as COES '03. IEEE cat no 03EX701



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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