Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Design, Tolerance Analysis, and Fabrication of Silicon Oxynitride Based Planar Optical Waveguides for Communication Devices


    Contributors:

    Published in:

    Publication date :

    1999-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



    Low-Loss and Low-Birefringence High-Contrast Silicon-Oxynitride Waveguides for Optical Communication

    Fadel, M. / Bulters, M. / Niemand, M. et al. | British Library Online Contents | 2009



    Characterization of PECVD oxynitride optical waveguides

    Ailing Zhang, / Kam Tai Chan, | IEEE | 2003


    Fabrication and Characterization of PECVD Oxynitride Rectangular and Rib Optical Waveguides

    Zhang, A. / Chan, K. T. | British Library Conference Proceedings | 2003


    Characterization of PECVD oxynitride optical waveguides

    Zhang, A. / Chan, K. T. / Guo li Taiwan da xue et al. | British Library Conference Proceedings | 2003