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    Title :

    Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film


    Contributors:
    Lu, J. (author) / Ikehara, T. (author) / Kobayashi, T. (author) / Maeda, R. (author) / Mihara, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 11-12 ; 1517-1522


    Publication date :

    2007-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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