A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity
MICROSYSTEM TECHNOLOGIES ; 18 , 1 ; 25-30
2012-01-01
6 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Bulk-Micromachined Optical Filter Based on Guided-Mode Resonance in Silicon-Nitride Membrane
British Library Online Contents | 2006
|Micromachined silicon structures for single-mode passive alignment [2691-15]
British Library Conference Proceedings | 1996
|SOLUTIONS - Mechanics - Micromachined Double Resonator
Online Contents | 2001
The study of silicon bulk micromachined angular acceleration sensor
Online Contents | 2000
|