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    Title :

    A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity


    Contributors:
    Wu, G. (author) / Xu, D. (author) / Xiong, B. (author) / Wang, Y. (author)

    Published in:

    Publication date :

    2012-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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