SOLUTIONS - Mechanics - Micromachined Double Resonator
NASA tech briefs ; 25 , 5 ; 58-59
2001
Article (Journal)
English
Two-Dimensional Micromachined Flow Sensor Array for Fluid Mechanics Studies
Online Contents | 2003
|A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity
British Library Online Contents | 2012
|A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide
British Library Online Contents | 2006
|SOLUTIONS - Books and Reports - Improved Micromachined Vaporizing-Liquid Microthruster
Online Contents | 2001
Micromachined pressure sensors pave way for new process solutions
British Library Online Contents | 2000