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    Title :

    Silver (Ag) as a novel masking material in glass etching for microfluidics applications


    Contributors:
    Lee, H. W. (author) / Bien, D. C. (author) / Badaruddin, S. A. (author) / Teh, A. S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 2 ; 253-259


    Publication date :

    2013-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Thermal Etching of Silver

    R. Shuttleworth / R. King / B. Chalmers | NTIS | 1946


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    MASKING MATERIAL AND MANUFACTURING METHOD THEREOF

    OGAWA MASANORI / FUJII SHIN | European Patent Office | 2016

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    Role of temperature and gas-chemistry in micro-masking of InP by ICP etching

    Karouta, F. / Docter, B. / Geluk, E.J. et al. | IEEE | 2005