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    Title :

    In-situ Processing Of GaAs/AiGaAs By Low Damage Selective Etching And Focussed Ion Beam Patterning


    Contributors:
    Skidmore, J.A. (author) / Spiers, G.D. (author) / English, J.H. (author) / Xu, Z. (author) / Green, D.L. (author) / Young, D.B. (author) / Coldren, L.A. (author) / Hu, E.L. (author) / Petroff, P.M. (author)


    Publication date :

    1991-01-01


    Size :

    162496 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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