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    Title :

    In-situ CI/sub 2/ Thermal Etching Of GaAs/AiGaAs For Damage Removal In A Plasma Etcher


    Contributors:
    Lechaton, J.S. (author) / Buchmann, P. (author) / Dietrich, H.-P. (author) / Sasso, G. (author) / Vettiger, P. (author) / Webb, D.J. (author)


    Publication date :

    1991-01-01


    Size :

    150870 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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