Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabrication of Complex Integrated Waveguide Filters Using Electron Beam Lithography


    Contributors:
    Millar, P. (author) / Liu, X. (author) / De La Rue, R. (author) / Aitchison, J.S. (author)


    Publication date :

    1998-01-01


    Size :

    109219 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Photomask fabrication of focusing diffractive optical elements using electron-beam lithography

    Babin, S. V. / Danilov, V. A. / SPIE | British Library Conference Proceedings | 1995



    Optimization of Diffraction Grating Profiles in Fabrication by the Electron-Beam Lithography

    Okano, M. / Yotsuya, T. / Kikuta, H. et al. | British Library Conference Proceedings | 2002


    Embedded Channel Polyimide Waveguide Fabrication by Direct Electron Beam Writing Method

    Maruo, Y. Y. / Sasaki, S. / Tamamura, T. | British Library Online Contents | 1995


    Electron beam lithography on LiF films for integrated active optical waveguides [3423-13]

    Baldacchini, G. / Burattini, E. / Grilli, A. et al. | British Library Conference Proceedings | 1998