Fabrication of Complex Integrated Waveguide Filters Using Electron Beam Lithography
1998-01-01
109219 byte
Conference paper
Electronic Resource
English
Photomask fabrication of focusing diffractive optical elements using electron-beam lithography
British Library Conference Proceedings | 1995
|Optimization of Diffraction Grating Profiles in Fabrication by the Electron-Beam Lithography
British Library Conference Proceedings | 2002
|Embedded Channel Polyimide Waveguide Fabrication by Direct Electron Beam Writing Method
British Library Online Contents | 1995
|Electron beam lithography on LiF films for integrated active optical waveguides [3423-13]
British Library Conference Proceedings | 1998
|