Vanadium dioxide films doped tantalum and tungsten were deposited on SiO2/Si substrate by modified Ion Beam Enhanced Deposition (IBED) method. The doped polycrystalline VO2 films have single (002) orientation. The phase transition temperature was 28 °C and 42 °C for W and Ta doping respectively. The TCR was -3.4%/K and -10.14%/K at 300K for V0.97W0.03O2 and V0.97Ta0.03O2 respectively. Experimental results shown the crystal lattice constant d was elongated about 0.34% and 0.24%, phase transition hysteresis was 2.1 °C and 1.2 °C, the resistivity change magnitude was 1.6 and 1.2 for W-and W-and W-and Ta-doped IBED VO2 films respectively.
Property comparison between tantalum and tungsten doped polycrystalline VO2 thin films
2008-12-01
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Conference paper
Electronic Resource
English
Sol-Gel Made Tantalum Oxide Doped Tungsten Oxide Films
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