A high sensitive Michelson interferometer with polarization shifting approach is proposed to determine the surface profile of optical devices with real time capability. The depth resolution in nanometer range and the lateral resolution smaller than 3 micrometer is demonstrated experimentally.


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    Title :

    Polarization-Shifting Profilometer


    Contributors:


    Publication date :

    2005-01-01


    Size :

    256734 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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