A high sensitive Michelson interferometer with polarization shifting approach is proposed to determine the surface profile of optical devices with real time capability. The depth resolution in nanometer range and the lateral resolution smaller than 3 micrometer is demonstrated experimentally.
Polarization-Shifting Profilometer
01.01.2005
256734 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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