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    Titel :

    Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process [3276-04]



    Kongress:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Erscheinungsdatum :

    01.01.1998


    Format / Umfang :

    8 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Resonating large-angle and low-consumption micromachined optical scanner [3276-09]

    Calmes, S. / Schweizer, S. / Renaud, P. et al. | British Library Conference Proceedings | 1998


    MEMS-based diffractive optical-beam-steering technology [3276-07]

    Winick, D. A. / Duewer, B. / Chaudhury, S. et al. | British Library Conference Proceedings | 1998


    Nr. 3276

    DataCite | 1908


    Optical measurement of LIGA milliengine performance [3276-02]

    Dickey, F. M. / Holswade, S. C. / Christenson, T. R. et al. | British Library Conference Proceedings | 1998


    Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology [3276-11]

    Brown, K. S. / Taylor, B. J. / Dawson, J. M. et al. | British Library Conference Proceedings | 1998