Angular rate sensor and accelerometer combined on the same micromachined CMOS chip
MICROSYSTEM TECHNOLOGIES ; 4 , 3 ; 139-142
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Angular rate sensor and accelerometer combined on the same micromachined CMOS chip
Tema Archiv | 1998
|Surface Micromachined Angular Rate Sensor
British Library Conference Proceedings | 1995
|Surface Micromachined Angular Rate Sensor
SAE Technical Papers | 1995
|Surface micromachined angular rate sensor
Kraftfahrwesen | 1995
|