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    Title :

    Angular rate sensor and accelerometer combined on the same micromachined CMOS chip


    Contributors:
    Sparks, D. R. (author) / Huang, X. (author) / Higdon, W. (author) / Johnson, J. D. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 3 ; 139-142


    Publication date :

    1998-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Angular rate sensor and accelerometer combined on the same micromachined CMOS chip

    Sparks, D.R. / Huang, x. / Higdon, W. et al. | Tema Archive | 1998


    Surface micromachined angular rate sensor

    Johnson,J.D. / Zarabadi,S.R. / Sparks,D.R. et al. | Automotive engineering | 1995


    Surface Micromachined Angular Rate Sensor

    Johnson, J. D. / Zarabadi, S. R. / Sparks, D. R. et al. | British Library Conference Proceedings | 1995


    Surface micromachined angular rate sensor

    Johnson, J.D. / Zarabadi, S.R. / Sparks, D.R. | Tema Archive | 1996


    Surface Micromachined Angular Rate Sensor

    Sparks, Douglas R. / Johnson, Jack D. / Zarabadi, Seyed R. | SAE Technical Papers | 1995