Bulk-Micromachined Optical Filter Based on Guided-Mode Resonance in Silicon-Nitride Membrane
JOURNAL OF LIGHTWAVE TECHNOLOGY ; 24 , 4 ; 1922-1928
01.01.2006
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 621.3692 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Enhanced Fluorescence Emission from Silicon-Rich Nitride Guided Mode Resonance Gratings
British Library Online Contents | 2014
|Micromachined Bolometer-Arrays with Silicon-Nitride Membranes
British Library Online Contents | 1996
|A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity
British Library Online Contents | 2012
|The study of silicon bulk micromachined angular acceleration sensor
Online Contents | 2000
|The study of silicon bulk micromachined angular acceleration sensor
Tema Archiv | 2000
|