A novel MEMS inertial sensor with the actuators drived by Lorentz force for increasing the initial sensing capacitance is proposed. The model of the sensor system is established and the simulations are finished by using Matlab/Simulink. The mechanical noise, the displacement response, the fringe effect and the air damping under various initial capacitance distance are analyzed, respectively. The results show that the working rang of the novel MEMS accelerometer is 4 mu m approximately 9 mu m, the static capacitance can reach to 25.17 pf for 4 micrometer initial comb capacitance distance, the displacement sensitivity is 0.7 micrometer/g, and the displacement response time is less than 0.05s. The mechanical noise is reduced from 13.2 to 1.2 by etching damping slots in the sensing combs of the actuators.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Modeling and investigation on the performance of a novel MEMS inertial sensor with the actuators drived by Lorentz force


    Beteiligte:
    Dong, Linxi (Autor:in) / Wang, Wei (Autor:in) / Li, Shouluo (Autor:in) / Liu, Baoqing (Autor:in) / Yan, Haixia (Autor:in)


    Erscheinungsdatum :

    2011


    Format / Umfang :

    4 Seiten, 9 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    INTRODUCING NOVEL MEMS LORENTZ FORCE MAGNETOMETER DESIGNS

    Al-Shaibah, Muneera / Li, Ru / Ali, Dima et al. | TIBKAT | 2021



    Boundary Layer Separation Control by Lorentz Force Actuators

    Dattarajan, Srinivasan / Johari, Hamid | AIAA | 2006


    Boundary Layer Separation Control by Lorentz Force Actuators

    Dattarajan, S. / Johari, H. / American Institute of Aeronautics and Astronautics | British Library Conference Proceedings | 2006


    Gas engines drived buses: economy and toxidity

    Skrecko, G.V. / Kacur, B.A. | Tema Archiv | 1992