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    Title :

    A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide


    Contributors:
    Dai, C. L. (author) / Yu, W. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 8 ; 766-772


    Publication date :

    2006-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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