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    Title :

    Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization


    Contributors:
    Mochizuki, H. (author) / Mekaru, H. (author) / Kusumi, S. (author) / Sato, N. (author) / Shimizu, M. (author) / Yamashita, M. (author) / Shimada, O. (author) / Hattori, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 547-550


    Publication date :

    2007-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Kohlmeier, T. / Seidemann, V. / Buttgenbach, S. et al. | British Library Online Contents | 2002


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    Tests on Double Layer Metalization

    Woo, D. S. | NTRS | 1983


    Multilayer metalization of MOS IC's

    Bouldin, D. L. / Feltner, W. R. / Hollis, B. R., Jr. et al. | NTRS | 1980