Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization
MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 547-550
01.01.2007
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
NTRS | 1980
|British Library Online Contents | 2002
|Progress in MOSFET double-layer metalization
NTRS | 1980
|Tests on Double Layer Metalization
NTRS | 1983
|Multilayer metalization of MOS IC's
NTRS | 1980
|