Numerical aperture increasing lens (NAIL) microscopy in reflected light imaging of Si integrated circuits is applied to laser signal injection microscopy. The improved lateral spatial resolution and signal to noise ratio provided by NAIL microscopy will greatly enhance the capability of laser signal injection microscopy.
Laser signal injection microscopy of Si integrated circuits with a numerical aperture increasing lens
01.01.2005
1002592 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
British Library Conference Proceedings | 2005
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